Handbook of plasma processing technology. Jerome J. Haber, Stephen M. Rossnagel, William D. Westwood

Handbook of plasma processing technology



Download Handbook of plasma processing technology



Handbook of plasma processing technology Jerome J. Haber, Stephen M. Rossnagel, William D. Westwood ebook djvu
Publisher: William Andrew
Language: English
Page: 535
ISBN: 0815512201, 9780815512202

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.



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